The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Oct. 04, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Hyungjoon Kim, Hwaseong-si, KR;
Je-Dong Lee, Hwaseong-si, KR;
Younghoon Kwon, Hwaseong-si, KR;
Myoungwoon Kim, Suwon-si, KR;
Il-Woo Kim, Hwaseong-si, KR;
Jiwoon Im, Hwaseong-si, KR;
Jaewon Jung, Hwaseong-si, KR;
Hee Jong Jeong, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An electronic circuit includes a first filter and a second filter. The first filter passes a first frequency component of a first harmonic frequency generated by a first voltage source to form a potential difference in a chamber and a second frequency component of a second harmonic frequency higher than the first harmonic frequency. The second filter removes the first frequency component and the second frequency component received from the first filter. The second harmonic frequency is included in a first frequency band determined based on a capacitance of the second filter.