The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Mar. 23, 2018
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Hans-Joerg Timme, Ottobrunn, DE;
Carsten Ahrens, Regensburg, DE;
Ruediger Bauder, Feldkirchen-Westerham, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 3/02 (2006.01); H03H 9/205 (2006.01); H03H 9/17 (2006.01); H01L 41/277 (2013.01); H03H 9/58 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); H01L 41/277 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/584 (2013.01); H03H 9/589 (2013.01); H03H 2003/025 (2013.01); H03H 2009/02188 (2013.01);
Abstract
Methods for manufacturing resonator structures and corresponding resonator structures are described. A first wafer including a first piezoelectric material is singulated and bonded to a second wafer.