The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 2022

Filed:

Dec. 04, 2018
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Yoshihiro Hosokawa, Tokyo, JP;

Takashi Akiyama, Tokyo, JP;

Yasushi Horiuchi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 5/00 (2006.01); H02K 11/20 (2016.01);
U.S. Cl.
CPC ...
G01L 5/0061 (2013.01); G01L 5/0038 (2013.01); H02K 11/20 (2016.01);
Abstract

Provided herein are: a movable part that is provided with coils placed correspondingly to magnets arranged in an arc shape, a pressure sensor, vertical-side hydrostatic pads, and a lateral-side hydrostatic plate and lateral-side hydrostatic pads caused to move in a manner matched to the shape of the magnets; and a stationary part that is provided with a base on which the magnets and vertical-side hydrostatic plates being opposite to the vertical-side hydrostatic pads are placed, a wall on which a lateral-side hydrostatic pad being opposite to the lateral-side hydrostatic plate is placed, a wall on which a lateral-side hydrostatic plate being opposite to the lateral-side hydrostatic pads is placed, and a wall to which an actuator coupled to the pressure sensor through a ball joint.


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