The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Oct. 30, 2018
Nec Corporation, Tokyo, JP;
National University Corporation Kagawa University, Takamatsu, JP;
Takeshi Akagawa, Tokyo, JP;
Masahiro Kubo, Tokyo, JP;
Katsumi Abe, Tokyo, JP;
Ersin Altintas, Tokyo, JP;
Yuji Ohno, Tokyo, JP;
Tetsuri Ariyama, Tokyo, JP;
Ichiro Ishimaru, Takamatsu, JP;
NEC CORPORATION, Tokyo, JP;
NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY, Takamatsu, JP;
Abstract
Optical measuring apparatus includes: a light source irradiating an object to be measured; a splitter splitting transmitted light or reflected light from the object to be measured; a phase changer changing a phase of a first light which is one of the lights split; a phase fixer maintaining a phase of a second light which is the other light split; a multiplexer multiplexing lights output from the phase changer and the phase fixer; a detector detecting the light (interference image) output from the multiplexer; and a controller that extracts a reference point from the interference image, when a displacement of the reference point is detected, corrects a luminance value for each pixel of the interference images in accordance with a displacement of the object to be measured indicated by a displacement of the reference point, constructs an interferogram based on the luminance value for each pixel of the interference images after the correction.