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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11230502 B1

PDFFull Text
Date of Patent:
Jan. 25, 2022

Filed:

Mar. 15, 2019

Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

En Yagi, Nagoya, JP;

Yuji Katsuda, Nagoya, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:

Burr & Brown, PLLC

Primary Examiner:

Karl E Group

Assistant Examiner:

Cameron K Miller

Int. Cl.
CPC ...
C04B 35/581 (2006.01); B28B 11/24 (2006.01); C04B 35/443 (2006.01); C04B 35/645 (2006.01); C04B 35/63 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01);
U.S. Cl.
CPC ...
C04B 35/581 (2013.01); B28B 11/243 (2013.01); C04B 35/443 (2013.01); C04B 35/6303 (2013.01); C04B 35/645 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); H01L 21/6833 (2013.01); H05B 1/0233 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/602 (2013.01); C04B 2235/763 (2013.01); C04B 2235/80 (2013.01); C04B 2235/9607 (2013.01); C04B 2235/9669 (2013.01);
Abstract

The composite sintered body includes AlN and MgAlO. The open porosity of the composite sintered body is lower than 0.1%. The relative density of the composite sintered body is not lower than 99.5%. The total percentage of the AlN and the MgAlOcontained in the composite sintered body is not lower than 95 weight percentage and not higher than 100 weight percentage. The percentage of the MgAlOcontained in the composite sintered body is not lower than 15 weight percentage and not higher than 70 weight percentage. It is thereby possible to provide a high-density composite sintered body having high plasma corrosion resistance, high volume resistivity, and high thermal conductivity.

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