The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Jan. 06, 2015
Organo Corporation, Tokyo, JP;
ORGANO CORPORATION, Tokyo, JP;
Abstract
An ozonated water supply method includes: feeding dissolving water contained in a circulation tank to an ozonation device at a given feed rate while feeding ultrapure water to the circulation tank, and returning ozonated water that has not been used at a use point to the circulation tank, dissolving ozone in the dissolving water using the ozonation device to obtain ozonated water, and feeding the ozonated water to the use point; feeding oxygen gas having a nitrogen gas content of 0.01 vol % or less to a discharge-type ozone gas-producer, and feeding the resulting ozone-containing gas to the ozonation device; adjusting the feed rate of the ultrapure water to the circulation tank; and adjusting the dissolved ozone concentration in the ozonated water. The method can reduce or suppress the accumulation of nitric acid in the recirculation system when a discharge-type ozone gas-producer is used as the ozone gas-producer.