The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Sep. 26, 2018
Applicant:
Board of Regents, the University of Texas System, Austin, TX (US);
Inventors:
Michael Cullinan, Austin, TX (US);
Joon-Hyung Cho, Austin, TX (US);
David Cayll, Sugarland, TX (US);
Ian Seth Ladner, Picayune, MS (US);
Assignee:
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/00 (2006.01); H03H 3/007 (2006.01); C01B 32/194 (2017.01); B81B 7/02 (2006.01); G01N 29/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/0073 (2013.01); B81B 7/02 (2013.01); C01B 32/194 (2017.08); G01N 29/022 (2013.01); C01B 2204/04 (2013.01);
Abstract
A method of manufacturing a nanoelectromechanical resonator allows for uniform tuning of a resonant frequency. The nanoelectromechanical resonator can be mass produced and used to sense the presence of a selected gas.