The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

Oct. 03, 2018
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventor:

Toru Hiyoshi, Osaka, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7815 (2013.01); H01L 29/1608 (2013.01); H01L 29/7813 (2013.01);
Abstract

The sense region is spaced from the active region. The isolation trench surrounds the sense region and isolates the sense region from the active region. The active region is provided with a first gate trench defined by a first side surface and a first bottom surface continuing to the first side surface. The first insulating film is in contact with both the first side surface and the first bottom surface. The first conductor is provided on the first insulating film. The second insulating film is provided in the isolation trench. The second conductor is provided on the second insulating film. The isolation trench reaches a first impurity region. The first insulating film is made of a material identical to that of the second insulating film. The first conductor is made of a material identical to that of the second conductor and is electrically isolated from the second conductor.


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