The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Sep. 18, 2018
Applicant:
Shin-etsu Polymer Co., Ltd., Tokyo, JP;
Inventor:
Osamu Ogawa, Saitama, JP;
Assignee:
Shin-Etsu Polymer Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67386 (2013.01);
Abstract
The present disclosure provides a substrate storage container equipped with a container main body that has an opening portion formed by an opening frame at a front surface and is capable of storing a plurality of substrates and a lid that closes the opening portion. The container main body is of a box-like shape having the opening frame, a rear wall, a right wall, a left wall, a top wall, and a bottom wall. Each of the walls has a thickness which is thinner at a side toward the opening frame at the front surface than at a side toward the rear wall.