The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Aug. 21, 2018
Korea Institute of Industrial Technology, Cheonan-si, KR;
Kyung Tae Nam, Incheon, KR;
Sang Moo Lee, Yongin-si, KR;
Seung Joon Lee, Gunpo-si, KR;
Kwang Hee Lee, Suwon-si, KR;
Sung Won Choo, Suwon-si, KR;
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY, Cheonan-Si Chungcheongnam-Do, KR;
Abstract
The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.