The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Jul. 02, 2020
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventors:
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01N 21/88 (2006.01); G01N 21/45 (2006.01); G06T 5/00 (2006.01); G06T 5/20 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 21/45 (2013.01); G06T 5/003 (2013.01); G06T 5/20 (2013.01); G06T 7/0002 (2013.01); G01N 2021/8887 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/06113 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/30168 (2013.01);
Abstract
A defect inspection apparatus generates a surface layer inspection image which is an image representing displacement of an inspection target in a measurement region based on an intensity pattern of interfered laser light. The defect inspection apparatus is configured to generate an appearance inspection image which is an image of an outer surface of the measurement region based on an intensity pattern of incoherent light.