The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

May. 09, 2018
Applicant:

Pioneer Corporation, Tokyo, JP;

Inventor:

Takanori Ochiai, Kawagoe, JP;

Assignee:

PIONEER CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01N 21/3586 (2014.01); G01B 11/06 (2006.01); G01B 15/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01B 11/06 (2013.01); G01B 15/02 (2013.01);
Abstract

An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a boundary surface of the plurality of layers on the basis of the detected waveform and a library indicating an estimated waveform, the library is generated on the basis of a sample waveform that is the detected waveform obtained by irradiating the sample or a sample member with the terahertz wave, the sample member has specifications that are same as those of the sample.


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