The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

May. 30, 2019
Applicant:

Sensata Technologies, Inc., Attleboro, MA (US);

Inventors:
Assignee:

Sensata Technologies, Inc., Attleboro, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01K 15/00 (2006.01); G01K 7/18 (2006.01); H01C 1/12 (2006.01); H01C 7/00 (2006.01); F01N 11/00 (2006.01); G01K 7/22 (2006.01); G01K 13/02 (2021.01);
U.S. Cl.
CPC ...
G01K 15/005 (2013.01); F01N 11/00 (2013.01); G01K 7/183 (2013.01); G01K 7/223 (2013.01); G01K 13/02 (2013.01); H01C 1/12 (2013.01); H01C 7/00 (2013.01); F01N 2560/025 (2013.01); G01K 2205/04 (2013.01);
Abstract

A method of manufacturing a sensor include depositing a metal layer on a substrate and fabricating a calibration structure on the metal layer. The calibration structure can include a first calibration portion and a second calibration portion. The method may further include, performing a first calibration of the sensor by modifying the first calibration portion. In addition, the method can include placing a cover layer on a portion of the first calibration portion after the first calibration and then performing a second calibration of the sensor by modifying the second calibration.


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