The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Sep. 17, 2019
Invensense, Inc., San Jose, CA (US);
Pei-Wen Yen, Hsinchu, TW;
Ting-Yuan Liu, Zhubei, TW;
Jye Ren, Taipei, TW;
Chung-Hsien Lin, Hsinchu, TW;
Joseph Seeger, Menlo Park, CA (US);
Calin Miclaus, Fremont, CA (US);
InvenSense, Inc., San Jose, CA (US);
Abstract
A device includes a microelectromechanical system (MEMS) sensor die comprising a deformable membrane, a MEMS heating element, and a substrate. The MEMS heating element is integrated within a same layer and a same plane as the deformable membrane. The MEMS heating element surrounds the deformable membrane and is separated from the deformable membrane through a trench. The MEMS heating element is configured to generate heat to heat up the deformable membrane. The substrate is coupled to the deformable membrane.