The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 2022

Filed:

Dec. 06, 2017
Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Kevin McCarron, Bend, OR (US);

Rick Morton, Bend, OR (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); G01N 29/02 (2006.01); G01N 29/036 (2006.01); G01N 29/22 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/222 (2013.01); H03H 3/02 (2013.01); H03H 9/02078 (2013.01); G01N 2291/0426 (2013.01); H03H 2003/025 (2013.01);
Abstract

A bulk acoustic wave sensor includes a delay layer. The sensor includes an acoustic mirror and a base resonator. The base resonator includes a piezoelectric layer and two electrodes. One or more delay layers are disposed adjacent to the base resonator. A delay layer may be disposed between the base resonator and the acoustic mirror, a delay layer may be disposed on the base resonator opposite to the acoustic mirror, or both. Each delay section is formed of high quality-factor material. The sensor may define a resonant frequency, and the thickness of each delay section may be an integer multiple of half-wavelengths of the resonant frequency.


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