The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2022
Filed:
Jun. 18, 2018
Nikon Research Corporation of America, Belmont, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Tsutomu Ogiwara, Saitama-ken, JP;
Kazuhiro Hirano, Ageo, JP;
Bausan Yuan, San Jose, CA (US);
NIKON RESEARCH CORPORATION OF AMERICA, Belmont, CA (US);
Abstract
A method for moving a stage relative to a base includes coupling a magnet assembly to the stage; coupling an array of coils to the base; and directing current to at least one of the coils with a control system that includes a processor to generate a force that levitates the stage relative to the base and moves the stage relative to the base. In one embodiment, the control system generates at least one current command that levitates and moves the stage while inhibiting the excitation of a first targeted flexible mode.