The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2022
Filed:
Oct. 27, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Kazuya Kitada, Matsumoto, JP;
Katsutomo Tsukahara, Shiojiri, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); B41J 2/14201 (2013.01); H01L 41/0477 (2013.01); H01L 41/0973 (2013.01);
Abstract
A piezoelectric element includes a first electrode provided at a base body, a piezoelectric layer provided at the first electrode and containing a composite oxide that contains potassium, sodium, and niobium and that has a perovskite structure, and a second electrode provided at the piezoelectric layer, wherein the first electrode is a platinum layer, the first electrode is preferentially oriented to (111), and the first electrode has an average crystal grain diameter of 200 nm or more.