The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 2022

Filed:

May. 23, 2016
Applicant:

Jun HU, San Bruno, CA (US);

Inventor:

Jun Hu, San Bruno, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 21/304 (2006.01); H01L 21/266 (2006.01); H01L 21/761 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66712 (2013.01); H01L 21/266 (2013.01); H01L 21/304 (2013.01); H01L 21/308 (2013.01); H01L 21/3065 (2013.01); H01L 21/761 (2013.01); H01L 29/0615 (2013.01); H01L 29/0619 (2013.01); H01L 29/0634 (2013.01); H01L 29/0638 (2013.01); H01L 29/404 (2013.01); H01L 29/7811 (2013.01);
Abstract

This invention discloses a semiconductor power device formed on an upper epitaxial layer of a first conductivity type supported on a semiconductor substrate comprises an active cell area and a termination area disposed near edges of the semiconductor substrate. The semiconductor power device having a super junction structure with the epitaxial layer formed with a plurality of doped columns of a second conductivity type. The termination area further comprises a plurality of surface guard ring regions of the second conductivity type dispose near a top surface of the epitaxial layer close to the doped columns of the second conductivity type. In one of the embodiments, one of the surface guard ring regions extending laterally over several of the doped columns in the termination area.


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