The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2022
Filed:
Mar. 03, 2020
Applicant:
Kaneka Corporation, Osaka, JP;
Inventor:
Takashi Kuchiyama, Settsu, JP;
Assignee:
KANEKA CORPORATION, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); B05D 1/34 (2006.01); B05D 3/10 (2006.01); C09K 13/04 (2006.01); C23F 1/02 (2006.01); C23F 1/14 (2006.01); H01L 21/027 (2006.01); H01L 21/3213 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/306 (2013.01); B05D 1/34 (2013.01); B05D 3/10 (2013.01); C09K 13/04 (2013.01); C23F 1/02 (2013.01); C23F 1/14 (2013.01); H01L 21/027 (2013.01); H01L 21/3213 (2013.01); H01L 28/26 (2013.01);
Abstract
A patterning sheet, or the like, is suitable when a complex etching target is to be etched in a simple manner to produce an etched structure. This patterning sheet comprises a base sheet formed from an etching-solution permeable first polymer, and particles dispersed in the base sheet and formed from a second polymer, which absorbs and holds the etching solution.