The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 2022

Filed:

Aug. 25, 2017
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventor:

Hamed Sadeghian Marnani, The Hague, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 21/16 (2006.01); G03F 9/00 (2006.01); G01B 5/14 (2006.01); G01B 5/16 (2006.01); G01B 7/14 (2006.01);
U.S. Cl.
CPC ...
G01B 21/16 (2013.01); G01B 5/14 (2013.01); G01B 5/16 (2013.01); G01B 7/14 (2013.01); G03F 9/7034 (2013.01); G03F 9/7053 (2013.01);
Abstract

A distance sensor () for estimating a distance to a surface (OS) of an object (O), the distance sensor including a micro electric mechanical system (MEMS) (), a detection means () and a processing device (). The MEMS comprises a MEMS device () having a surface (), denoted as MEMS sensor surface, to be arranged opposite the surface (OS) of said object (O) and a MEMS driver () for generating an ac driving signal to cause the MEMS sensor surface () to vibrate. The detection means () is to determine a value of a property of a dynamic behavior of the MEMS () and the processing device () is to estimate an average distance (h) as a measured distance (D) between the MEMS sensor surface () and the surface (Os) of the object (O) based on the determined value for said property.


Find Patent Forward Citations

Loading…