The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2022
Filed:
Feb. 20, 2019
Meidensha Corporation, Tokyo, JP;
MEIDENSHA CORPORATION, Tokyo, JP;
Abstract
An ozone processing device has a processing chamber in which a wafer is disposed, and a shower head in the processing chamber. The shower head is away from the surface to be processed of the wafer and facing the wafer. The surface of the shower head which faces the wafer has gas injection holes from which a gas to be supplied to the wafer and exhaust gas flow path portions that are areas in which the gas is not injected. An area in which the gas injection holes are formed is in the central part of the shower head, and a plurality of the exhaust gas flow path portions extending from the area toward the outer periphery of the shower head are arranged in the circumferential direction of the shower head. The gas injection holes are formed in each of areas disposed between the exhaust gas flow path portions.