The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Dec. 18, 2019
Applicant:

Daihen Corporation, Osaka, JP;

Inventor:

Tatsuya Morii, Osaka, JP;

Assignee:

DAIHEN Corporation, Osaka, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03H 7/38 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H03H 7/38 (2013.01); H01J 37/32183 (2013.01);
Abstract

An impedance matching deviceincludes multiple capacitance elements and a control unit that controls on or off of semiconductor switches. The capacitance elements and respectively include a first capacitance element group and a second capacitance element group. The control unit updates the state of the first semiconductor switch included in the first capacitance element group with a first cycle until a predetermined time period elapses during which the state of the first semiconductor switch included in the first capacitance element group is maintained while the control unit updates the states of the semiconductor switch and respectively included in the first capacitance element group and the second capacitance element group with a second cycle longer than the first cycle after the predetermined time period elapses during which the state of the first semiconductor switch included in the first capacitance element group is maintained.


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