The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Apr. 22, 2016
Applicant:
Vesper Technologies Inc., Boston, MA (US);
Inventor:
Robert Littrell, Boston, MA (US);
Assignee:
Vesper Technologies Inc., Boston, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01); H01L 41/27 (2013.01); H01L 41/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); C23C 14/06 (2006.01); C23C 14/14 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01); H01L 41/113 (2006.01); H01L 41/316 (2013.01); H04R 7/06 (2006.01); H04R 17/02 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0838 (2013.01); B81B 3/0072 (2013.01); B81C 1/00666 (2013.01); C23C 14/0641 (2013.01); C23C 14/14 (2013.01); C23C 14/34 (2013.01); C23C 14/542 (2013.01); H01L 41/04 (2013.01); H01L 41/083 (2013.01); H01L 41/1136 (2013.01); H01L 41/27 (2013.01); H01L 41/316 (2013.01); H04R 7/06 (2013.01); H04R 17/02 (2013.01); H04R 31/003 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81C 2201/017 (2013.01);
Abstract
A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.