The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Jan. 08, 2020
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Tetsuhiro Tanaka, Tokyo, JP;

Kazuki Tanemura, Kanagawa, JP;

Daisuke Matsubayashi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 29/40 (2006.01); H01L 49/02 (2006.01); H01L 27/12 (2006.01); H01L 23/522 (2006.01); H01L 27/06 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 29/408 (2013.01); H01L 23/5223 (2013.01); H01L 27/1207 (2013.01); H01L 27/1225 (2013.01); H01L 27/1251 (2013.01); H01L 27/1255 (2013.01); H01L 28/00 (2013.01); H01L 28/60 (2013.01); H01L 29/78648 (2013.01); H01L 29/78696 (2013.01); H01L 21/8258 (2013.01); H01L 27/0629 (2013.01); H01L 27/0688 (2013.01);
Abstract

A miniaturized transistor with reduced parasitic capacitance and highly stable electrical characteristics is provided. High performance and high reliability of a semiconductor device including the transistor is achieved. A first conductor is formed over a substrate, a first insulator is formed over the first conductor, a layer that retains fixed charges is formed over the first insulator, a second insulator is formed over the layer that retains fixed charges, and a transistor is formed over the second insulator. Threshold voltage Vis controlled by appropriate adjustment of the thicknesses of the first insulator, the second insulator, and the layer that retains fixed charges.


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