The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Feb. 11, 2020
Nanya Technology Corporation, New Taipei, TW;
Chih-Tsung Wu, Taoyuan, TW;
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Abstract
The present disclosure provides a semiconductor device with a porous dielectric structure for reducing capacitive coupling between conductive features. The semiconductor device includes a substrate; a gate structure positioned above the substrate; two source/drain regions positioned adjacent to two sides of the gate structure; two porous spacers positioned between the source/drain regions and the gate structure, wherein a porosity of the two porous spacers is between about 25% and about 100%; a porous capping layer positioned on the gate structure and between the two porous spacers, wherein a porosity of the porous capping layer is between about 25% and about 100%; and an insulating layer disposed over the two porous spacers and the porous capping layer.