The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Dec. 06, 2019
Government of the United States of America, As Represented BY the Secretary of Commerce, Gaithersburg, MD (US);
Glenn Emerson Holland, Rockville, MD (US);
GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE, Gaithersburg, MD (US);
Abstract
A non-vacuum, non-contact spinner wafer chuck including: a basal member including; a fastener receiver that receives a fastener; a chuck collar including: an inner collar wall; and an outer collar wall; and an engagement surface that: receives and engages a wafer; a wafer engagement cam including: an engagement face that engages the wafer; an index cam disposed on the chuck collar and comprising: an index face that faces toward the fastener receiver and that engages the wafer; and a spinner engager disposed on the spinner-side surface of the basal member and comprising: a spinner arm receiver bounded by a wall and that receives a spinner of the wafer processing machine, wherein the wafer engagement cam and the index cam engage the wafer and maintains an orientation of the wafer with respect to the index cam in response to rotation of the wafer relative to the non-vacuum, non-contact spinner wafer chuck.