The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Sep. 16, 2020
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Manabu Ueda, Kyoto, JP;

Takashi Umemoto, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/42 (2006.01); G01N 30/72 (2006.01); H01J 49/24 (2006.01); H01J 49/06 (2006.01); G01N 30/02 (2006.01);
U.S. Cl.
CPC ...
H01J 49/4215 (2013.01); G01N 30/72 (2013.01); H01J 49/062 (2013.01); H01J 49/068 (2013.01); H01J 49/24 (2013.01); H01J 49/4225 (2013.01); G01N 2030/027 (2013.01);
Abstract

A vacuum chamberfor forming a vacuum space has two side walls opposite to each other across an ion beam axis extending within the vacuum space. One of those side walls is openable and closeable. An ion optical elementis placed on a base, which is located on the bottom surface of the vacuum chamber. A fixation bandfixes the ion optical element on the base by holding the element between the base and the fixation band so as to press the element onto the base. A band-catching portion, located on an inside face of a side wall of the vacuum chamber on the opposite side from the openable-and-closeable side wall, catches one end of the fixation band. A band-fixing portion, located on the base on the side where the openable-and-closeable side wall is present, fixes the other end of the fixation band to the base.


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