The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

May. 12, 2020
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Melissa A. Smith, Cambridge, MA (US);

Donna-Ruth W. Yost, Acton, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/04 (2006.01); H01J 9/02 (2006.01); H01J 27/26 (2006.01);
U.S. Cl.
CPC ...
H01J 3/04 (2013.01); H01J 9/02 (2013.01); H01J 27/26 (2013.01); H01J 2209/012 (2013.01);
Abstract

In some embodiments, a self-aligned electrospray device can include a silicon wafer, a fluid reservoir, and a circuit. The silicon wafer can have a layer of electrically insulating material deposited on a top surface and a deposited layer of electrically conducting material. The silicon wafer and the deposited layers can have through holes. The electrically insulating layer may be undercut. The fluid reservoir can be mounted to a bottom surface of the silicon wafer for containing fluid. The circuit can provide an electric potential difference and be coupled between the layer of electrically conducting material and the fluid reservoir.


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