The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Nov. 08, 2016
Applicant:
Mitsubishi Electric Corporation, Tokyo, JP;
Inventors:
Satoi Kobayashi, Tokyo, JP;
Takaki Sugino, Tokyo, JP;
Takafumi Hara, Tokyo, JP;
Yuji Kawano, Tokyo, JP;
Assignee:
Mitsubishi Electric Corporation, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/58 (2006.01); G01J 5/10 (2006.01); G01J 5/06 (2006.01); G01J 5/08 (2006.01); G01J 5/20 (2006.01); G01J 5/02 (2006.01);
U.S. Cl.
CPC ...
G01J 5/10 (2013.01); G01J 5/024 (2013.01); G01J 5/06 (2013.01); G01J 5/0825 (2013.01); G01J 5/0853 (2013.01); G01J 5/20 (2013.01); G01J 2005/065 (2013.01);
Abstract
In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.