The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Mar. 19, 2019
Applicant:

The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);

Inventors:

Michel J. F. Digonnet, Palo Alto, CA (US);

Behrad Habib Afshar, Stanford, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/353 (2006.01); G02B 26/06 (2006.01); G01H 9/00 (2006.01);
U.S. Cl.
CPC ...
G01D 5/35367 (2013.01); G01H 9/006 (2013.01); G02B 26/06 (2013.01);
Abstract

A sensor includes at least one optical waveguide having a mode-field diameter greater than 11 μm and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.


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