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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11215180 B1

PDFFull Text
Date of Patent:
Jan. 04, 2022

Filed:

Jun. 12, 2013

Method and pump arrangement for evacuating a chamber

Applicant:

Sterling Industry Consult Gmbh, Itzehoe, DE;

Inventors:

Heiner Kösters, Itzehoe, DE;

Jörg Temming, Kölln-Reisiek, DE;

Daniel Kühlein, Quickborn, DE;

Assignee:

Sterling Industry Consult GmbH, Itzehoe, DE;

Attorney:

Alix, Yale & Ristas, LLP

Primary Examiner:

Dominick L Plakkoottam

Assistant Examiner:

Charles W Nichols

Int. Cl.
CPC ...
F04D 15/00 (2006.01); F04D 1/06 (2006.01); F04C 2/10 (2006.01); F04C 14/08 (2006.01); F04C 28/06 (2006.01); F04C 28/02 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 18/08 (2006.01); F04C 18/16 (2006.01);
U.S. Cl.
CPC ...
F04C 28/06 (2013.01); F04C 2/10 (2013.01); F04C 14/08 (2013.01); F04C 23/005 (2013.01); F04C 25/02 (2013.01); F04C 28/02 (2013.01); F04C 18/084 (2013.01); F04C 18/086 (2013.01); F04C 18/16 (2013.01); F04C 2220/30 (2013.01);
Abstract

A method for evacuating a chamber employs a pump arrangement composed of a booster pump and of a downstream forepump is connected to the chamber. The booster pump is accelerated, gas from the chamber is introduced into the booster pump, such that from the booster pump there is temporarily extracted an excess power which exceeds the power provided by the drive of the booster pump. The gas is discharged through a bypass valve while the outlet pressure of the booster pump lies above a predefined threshold value, and the gas is directed to the forepump when the outlet pressure of the booster pump has fallen below the threshold value. The gas supplied by the booster pump is compressed by means of the forepump.

Find Patent Forward Citations

Quick Actions:

Kösters, Heiner. (2022). Method and pump arrangement for evacuating a chamber (U.S. Patent No. 11215180). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11215180

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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