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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11214870 B1

PDFFull Text
Date of Patent:
Jan. 04, 2022

Filed:

May. 25, 2018

Chemical vapor deposition system including ground strap bar

Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventors:

Jaihyuk Choi, Hwaseong-si, KR;

Jong-hoon Park, Asan-si, KR;

Kyungjoo Min, Yongin-si, KR;

Wonwoong Park, Seoul, KR;

Sukwon Jung, Sejong-si, KR;

Hyunwoo Joo, Seoul, KR;

Myungsoo Huh, Suwon-si, KR;

Assignee:

Samsung Display Co., Ltd.;

Attorney:

Innovation Counsel LLP

Primary Examiner:

Karl Kurple

Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); C23C 16/50 (2006.01); H01L 21/687 (2006.01); C23C 16/509 (2006.01); C23C 16/455 (2006.01); H01R 9/16 (2006.01); H01R 9/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 16/4401 (2013.01); C23C 16/458 (2013.01); C23C 16/4583 (2013.01); C23C 16/4585 (2013.01); C23C 16/45544 (2013.01); C23C 16/5096 (2013.01); H01J 37/32577 (2013.01); H01J 37/32697 (2013.01); H01J 37/32715 (2013.01); H01J 37/32807 (2013.01); H01L 21/68785 (2013.01); H01J 2237/3321 (2013.01); H01L 21/0217 (2013.01); H01L 21/0262 (2013.01); H01L 21/02164 (2013.01); H01L 21/02274 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02592 (2013.01); H01R 9/00 (2013.01); H01R 9/16 (2013.01);
Abstract

A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.

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