The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Nov. 16, 2017
Applicant:
Yokogawa Electric Corporation, Tokyo, JP;
Inventors:
Takashi Yoshida, Tokyo, JP;
Yusaku Yoshida, Tokyo, JP;
Makoto Noro, Tokyo, JP;
Atsushi Yumoto, Tokyo, JP;
Shuhei Yoshita, Tokyo, JP;
Assignee:
Yokogawa Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/2447 (2013.01); H03H 9/02338 (2013.01); H03H 2009/02291 (2013.01);
Abstract
A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.