The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 28, 2021

Filed:

Mar. 24, 2020
Applicant:

SK Hynix Inc., Gyeonggi-do, KR;

Inventors:

Se-Han Kwon, Gyeonggi-do, KR;

Dong-Soo Kim, Gyeonggi-do, KR;

Assignee:

SK hynix Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 29/49 (2006.01); H01L 21/3105 (2006.01); H01L 29/423 (2006.01); H01L 27/108 (2006.01); H01L 21/67 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 21/0217 (2013.01); H01L 21/28088 (2013.01); H01L 21/31056 (2013.01); H01L 21/32136 (2013.01); H01L 21/67075 (2013.01); H01L 27/10823 (2013.01); H01L 27/10876 (2013.01); H01L 29/4238 (2013.01); H01L 29/42368 (2013.01); H01L 29/4966 (2013.01); H01L 29/4991 (2013.01);
Abstract

Disclosed is a semiconductor device for improving a gate induced drain leakage and a method for fabricating the same, and the method may include forming a trench in a substrate, lining a surface of the trench with an initial gate dielectric layer, forming a gate electrode to partially fill the lined trench, forming a sacrificial material spaced apart from a top surface of the gate electrode and to selectively cover a top corner of the lined trench, removing a part of the initial gate dielectric layer of the lined trench which is exposed by the sacrificial material in order to form an air gap, and forming a capping layer to cap a side surface of the air gap, over the gate electrode.


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