The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 28, 2021

Filed:

Feb. 26, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Jianshi Tang, Elmsford, NY (US);

Takashi Ando, Tuckahoe, NY (US);

Reinaldo Vega, Mahopac, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 47/00 (2006.01); H01L 27/24 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/2454 (2013.01); H01L 45/085 (2013.01); H01L 45/1206 (2013.01); H01L 45/1253 (2013.01); H01L 45/14 (2013.01); H01L 45/1608 (2013.01);
Abstract

Vertically stacked memory devices and methods of manufacture are provided. The structures include a substrate stack including a first row of horizontal electrodes disposed over a first insulating layer and first insulating layer disposed over a substrate. The substrate stack further includes a second row of horizontal electrodes separated from the first row of horizontal electrodes by a second insulating layer, and the first row of horizontal electrodes is form over and substantially parallel to the second row of horizontal electrodes. A third insulating layer is formed over the second row of horizontal electrodes. A plurality of vertical gate trenches formed through the third insulating layer, the second row of horizontal electrodes, the second insulating layer, the first row of horizontal electrodes and the first insulating layer. The plurality of vertical gate trenches filled with a layer of channel material, a layer of electrolyte material and filled with a metal.


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