The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Aug. 29, 2019
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Yasuhito Yoshimizu, Yokkaichi Mie, JP;
Hakuba Kitagawa, Yokkaichi Mie, JP;
Takaumi Morita, Yokkaichi Mie, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/445 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6715 (2013.01); H01L 21/445 (2013.01); H01L 21/673 (2013.01);
Abstract
According to one embodiment, a substrate processing apparatus includes a table configured to place a substrate thereon and to connect the substrate to a positive electrode, an counter electrode located opposite to the table, having a plurality of holes, and connected to a negative electrode, and a holding unit located opposite to the table across the counter electrode and configured to supply a chemical liquid to the counter electrode while holding the counter electrode.