The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 28, 2021

Filed:

Jul. 06, 2018
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Tomofumi Suzuki, Hamamatsu, JP;

Kyosuke Kotani, Hamamatsu, JP;

Tatsuya Sugimoto, Hamamatsu, JP;

Yutaka Kuramoto, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); B81B 3/00 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01); G01J 3/14 (2006.01); G01J 3/45 (2006.01); G02B 7/182 (2021.01); G02B 26/08 (2006.01); G02B 27/14 (2006.01); G01J 3/453 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02051 (2013.01); B81B 3/00 (2013.01); B81B 3/007 (2013.01); B81B 3/0021 (2013.01); G01B 9/02049 (2013.01); G01J 3/021 (2013.01); G01J 3/0237 (2013.01); G01J 3/108 (2013.01); G01J 3/14 (2013.01); G01J 3/45 (2013.01); G02B 7/182 (2013.01); G02B 26/0816 (2013.01); G02B 27/144 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0154 (2013.01); G01B 2290/35 (2013.01); G01J 3/4532 (2013.01); G01J 3/4535 (2013.01); G01J 2003/104 (2013.01);
Abstract

An optical moduleincludes: a mirror unitincluding a base, a movable mirror, and a fixed mirror; a beam splitter unitthat is disposed on one side of the mirror unitin a Z-axis direction; a light incident unitthat causes measurement light Lto be incident to the beam splitter unit; a first light detectorthat is disposed on the one side of the beam splitter unitin the Z-axis direction, and detects interference light Lof measurement light which is emitted from the beam splitter unit; a supportto which the mirror unitis attached; a first support structurethat supports the beam splitter unit; and a second support structurethat is attached to the supportand supports the first light detector


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