The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Jun. 19, 2018
Shin-etsu Polymer Co., Ltd., Tokyo, JP;
Osamu Ogawa, Saitama, JP;
Shin-Etsu Polymer Co., Ltd., Tokyo, JP;
Abstract
A substrate storage container is provided with a valve body attached thereto which includes a first cylindrical portion having one end communicating with the outside of a container body, a second cylindrical portion having one end communicating with the interior of the container body and spaced apart from the other end of the first cylindrical portion, a plug member positioned between the other end of the first cylindrical portion and the other end of the second cylindrical portion, and an elastic body that covers at least the plug member and has an inner diameter equal to or smaller than the outer diameter of the plug member, and wherein gas flow to the container body is controlled by close contact between the plug member and the elastic body.