The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Jun. 25, 2020
Airex Co., Ltd., Aichi, JP;
Koji Kawasaki, Aichi, JP;
Abstract
A particle control method configured prevent an extremely small quantity of particles descending on a stream of a laminar flow in a clean zone through which the laminar flow flows (as in a RABS or isolator device) from descending to a specific position or to guide the particles so as to have them descend to a specific position by controlling movement of the particles. [Solution] A particle descent position is separated away from a board surface of the oscillation board by using an acoustic radiation pressure generated by prompting ultrasonic vibration of the oscillation board disposed with a board surface substantially in parallel with a flow direction of the laminar flow. Moreover, by using a node of a standing wave field generated by prompting the ultrasonic vibration of two oscillation boards disposed with the board surfaces faced with each other, the particle is guided to a direction of a node of a standing wave field. Moreover, by using a focal point of the ultrasonic wave generated by prompting the ultrasonic wave of four oscillation boards, that is, two pairs disposed with the board surfaces faced with each other, the particle is guided to the focal point of the ultrasonic wave.