The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
Nov. 16, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/10 (2006.01); H01L 41/053 (2006.01); H01L 41/08 (2006.01); H02N 2/14 (2006.01); G02B 7/04 (2021.01); B25J 9/00 (2006.01); B65G 23/00 (2006.01); B41J 2/14 (2006.01); H01L 21/677 (2006.01); B25J 9/12 (2006.01); G03B 21/00 (2006.01);
U.S. Cl.
CPC ...
H02N 2/103 (2013.01); B25J 9/0009 (2013.01); B25J 9/12 (2013.01); B41J 2/14201 (2013.01); B65G 23/00 (2013.01); G02B 7/04 (2013.01); H01L 21/67706 (2013.01); H01L 41/0533 (2013.01); H01L 41/0536 (2013.01); H01L 41/0825 (2013.01); H02N 2/145 (2013.01); G03B 21/006 (2013.01);
Abstract
A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20° in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.