The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
Oct. 03, 2017
Applicant:
Universal Display Corporation, Ewing, NJ (US);
Inventors:
Siddharth Harikrishna Mohan, Plainsboro, NJ (US);
Paul E. Burrows, Chattaroy, WA (US);
Assignee:
Universal Display Corporation, Ewing, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/34 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0008 (2013.01); B05B 1/3402 (2018.08); H01L 51/56 (2013.01);
Abstract
Nozzle designs which have been found to be effective in governing overspray in OVJP are provided. Aspects of the invention have been found to be effective in reducing or avoiding sudden pressure drops at the end of the nozzle close to the substrate, and may be advantageously employed in obtaining, for example, greater consistency between the nozzle outlet diameter and the deposited pattern width.