The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
Oct. 26, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Steven C. Shackleton, Austin, TX (US);
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/3105 (2006.01); H01L 21/67 (2006.01); H01L 23/544 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); H01L 21/31051 (2013.01); H01L 21/67092 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01);
Abstract
An apparatus may include a superstrate. The superstrate may have a body with a first side, a second side opposite the first side, and a first diameter. The superstrate may also include a mesa on the first side of the body. The mesa may have a second diameter. The center point of the body can be different from the center point of the mesa.