The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 21, 2021

Filed:

Feb. 24, 2020
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventor:

Jose Antonio Martinez, Murphy, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/00 (2006.01); H01L 23/552 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00793 (2013.01); B81B 7/0041 (2013.01); B81C 1/00293 (2013.01); B81C 1/00317 (2013.01); H01L 23/552 (2013.01); H01L 23/564 (2013.01); B81B 2201/01 (2013.01); B81B 2201/0221 (2013.01); B81B 2201/042 (2013.01); B81C 2201/053 (2013.01); B81C 2203/0136 (2013.01);
Abstract

In described examples, a cavity is formed between a substrate and a cap. One or more access holes are formed through the cap for removing portions of a sacrificial layer from within the cavity. A cover is supported by the cap, where the cover is for occulting the one or more access holes along a perspective. An encapsulant seals the cavity, where the encapsulant encapsulates the cover and the one or more access holes.


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