The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
May. 16, 2018
Applicant:
Universal Display Corporation, Ewing, NJ (US);
Inventors:
Xin Xu, West Windsor, NJ (US);
Gregory McGraw, Yardley, PA (US);
William E. Quinn, Whitehouse Station, NJ (US);
Assignee:
Universal Display Corporation, Ewing, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); B41J 2/14 (2006.01); C23C 14/22 (2006.01); C23C 14/12 (2006.01); C23C 14/04 (2006.01); B41J 2/04 (2006.01); B05B 12/18 (2018.01); B41J 2/045 (2006.01); C23C 16/455 (2006.01); H01L 27/32 (2006.01); H01L 51/50 (2006.01); H01L 51/52 (2006.01); H05B 33/10 (2006.01); H05B 33/12 (2006.01);
U.S. Cl.
CPC ...
H01L 51/001 (2013.01); B05B 12/18 (2018.02); B41J 2/04 (2013.01); B41J 2/045 (2013.01); B41J 2/1433 (2013.01); C23C 14/04 (2013.01); C23C 14/12 (2013.01); C23C 14/228 (2013.01); C23C 16/45563 (2013.01); H01L 27/3209 (2013.01); H01L 51/0035 (2013.01); H01L 51/5016 (2013.01); H01L 51/5234 (2013.01); H05B 33/10 (2013.01); H05B 33/12 (2013.01); B41J 2202/02 (2013.01); H01L 51/0004 (2013.01);
Abstract
OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.