The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Aug. 31, 2020
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Sumiko Domae, Yokohama Kanagawa, JP;
Daisaburo Takashima, Yokohama Kanagawa, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C 7/06 (2006.01); H01L 27/11597 (2017.01); H01L 27/11592 (2017.01); H01L 27/11509 (2017.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); G11C 7/18 (2006.01); H01L 27/11514 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11597 (2013.01); G11C 7/06 (2013.01); G11C 7/18 (2013.01); H01L 27/11509 (2013.01); H01L 27/11514 (2013.01); H01L 27/11592 (2013.01); H01L 29/6684 (2013.01); H01L 29/78391 (2014.09);
Abstract
A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar ferroelectric film, a semiconductor film disposed between the ferroelectric film and the conductive layers, and an insulating film disposed between the semiconductor film and the conductive layers.