The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Jan. 23, 2020
Berliner Glas Kgaa Herbert Kubatz Gmbh & Co., Berlin, DE;
Stefan Hoescheler, Berlin, DE;
David Kieven, Berlin, DE;
Marcel Ziemann, Berlin, DE;
Carsten Pampuch, Berlin, DE;
BERLINER GLAS GMBH, Berlin, DE;
Abstract
A holding apparatus, which is adapted for electrostatically holding a component, in particular a wafer, comprises an electrically insulating base body, which comprises a first pair of base body plates, which are connected to one another in a planar manner via a joint connection, and an electrode device with at least one electrode layer, which is arranged to generate an electrostatic holding force and extends parallel to the extension of the base body plates along the joining connection, wherein the joining connection comprises a diffusion bond connection, wherein the at least one electrode layer is connected in a planar manner to the respectively adjacent base body plate, and the at least one electrode layer has a contact section, which is arranged for electrically contacting the at least one electrode layer. Methods for manufacturing the holding apparatus are also described.