The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 14, 2021

Filed:

Aug. 26, 2014
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventor:

Ulysses Gilchrist, Reading, MA (US);

Assignee:

Brooks Automation, Inc, Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); B25J 9/04 (2006.01); B25J 18/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/042 (2013.01); B25J 18/04 (2013.01); G05B 2219/40301 (2013.01); Y10T 74/20323 (2015.01);
Abstract

A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.


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