The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Aug. 08, 2019
Applicant:
Western Digital Technologies, Inc., San Jose, CA (US);
Assignee:
WESTERN DIGITAL TECHNOLOGIES, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/04 (2006.01); H01L 21/67 (2006.01); G01R 31/28 (2006.01); H01L 21/683 (2006.01); H01L 27/11582 (2017.01); H01L 27/11556 (2017.01);
U.S. Cl.
CPC ...
G01R 1/0408 (2013.01); G01R 31/2831 (2013.01); H01L 21/67288 (2013.01); H01L 21/6838 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01);
Abstract
A wafer testing system and a method of testing a wafer include placing a wafer on a vacuum chuck containing a plurality of vacuum zones, determining a warpage of the wafer, providing a different magnitude of vacuum suction to different vacuum zones at the same time based on the determined warpage of the wafer to reduce the warpage of the wafer, and testing the wafer.