The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 14, 2021

Filed:

Feb. 11, 2020
Applicant:

The Trustees of the University of Pennsylvania, Philadelphia, PA (US);

Inventors:

Igor Bargatin, Wynnewood, PA (US);

Keivan Davami, Philadelphia, PA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/12 (2006.01); C23C 16/455 (2006.01); C23C 16/01 (2006.01); C23C 16/12 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 16/01 (2013.01); C23C 16/12 (2013.01); C23C 16/45555 (2013.01); C23C 16/50 (2013.01); H01J 37/321 (2013.01); H01J 2237/334 (2013.01);
Abstract

A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.


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