The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 07, 2021

Filed:

Feb. 06, 2019
Applicant:

Kyocera Tikitin Oy, Espoo, FI;

Inventor:

Antti Jaakkola, Espoo, FI;

Assignee:

KYOCERA Tikitin Oy, Espoo, FI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); B81B 3/00 (2006.01); B81B 7/04 (2006.01); H01L 41/09 (2006.01); H03H 9/05 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02244 (2013.01); B81B 3/0018 (2013.01); B81B 7/04 (2013.01); H01L 41/0933 (2013.01); H03H 9/0595 (2013.01); H03H 9/2447 (2013.01); H03H 2009/02496 (2013.01);
Abstract

A microelectromechanical resonator includes a support structure, a resonator element suspended to the support structure, and an actuator for exciting the resonator element to a resonance mode. The resonator element includes a plurality of adjacent sub-elements each having a length and a width and a length-to-width aspect ratio of higher than 1 and being adapted to a resonate in a length-extensional, torsional or flexural resonance mode. Further, each of the sub-elements is coupled to at least one other sub-element by one or more connection elements coupled to non-nodal points of the of said resonance modes of the sub-elements for exciting the resonator element into a collective resonance mode.


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